| 2008-04 | Effect of sodium periodate in alumina-based slurry on Ru CMP for metal-insulator-metal capacitor | 박진구 |
| 2008-04 | Effect of sodium periodate in alumina-based slurry on RuCMP for metal-insulator-metal capacitor | 박진구 |
| 2021-02 | Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics | 박진구 |
| 2021-02 | The Effect of Thermal Aging on Nano-Particle Removal | 박진구 |
| 2012-08 | Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask | 박진구 |
| 2012-09 | Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask | 박진구 |
| 2021-09 | Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum | 박진구 |
| 2012-04 | Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window | 박진구 |
| 2004-06 | The Effects of Mechanical Properties of Polishing Pads on Oxide CMP(Chemical Mechanical Planarization) | 박진구 |
| 2005-10 | The Effects of pH Adjustors in Post Cu CMP Cleaning Solutions on Particle Adhesion and Removal | 박진구 |
| 2014-11 | Effects of pump-induced particle agglomeration during chemical mechanical planarization (CMP) | 박진구 |
| 2009-02 | Effects of size, humidity, and aging on particle removal from Si wafers | 박진구 |
| 2011-11 | Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications | 박진구 |
| 2011-10 | Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process | 박진구 |
| 2012-08 | Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process | 박진구 |
| 2011-06 | Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip | 박진구 |
| 2011-06 | Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip | 박진구 |
| 2011-04 | Enhancement of airborne shock wave by laser-induced breakdown of liquid column in laser shock cleaning | 박진구 |
| 2011-04 | Enhancement of airborne shock wave by laser-induced breakdown of liquid column in laser shock cleaning | 박진구 |
| 2016-12 | Evaluation of competitive reaction of various cu CMP slurry components | 박진구 |
| 2013-04 | Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates | 박진구 |
| 2013-04 | Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates | 박진구 |
| 2011-12 | Evaluation of glass lapping using fixed abrasive pad | 박진구 |
| 2016-02 | Evaluation of various composition Cu-resin plates in sapphire DMP (Diamond Mechanical Polishing) process | 박진구 |
| 2013-01 | Evaluation of very dilute alkaline solutions for wafer cleaning with megasonic irradiation | 박진구 |
| 2005-12 | Experimental and analytical study of submicrometer particle removal from deep trenches | 박진구 |
| 2006-07 | Experimental and numerical investigation of nanoparticle removal using acoustic streaming and the effect of time | 박진구 |
| 2010-07 | Fabrication and Characterization of a 32 x 32 Array Digital Si-PIN X-ray Detector for a Single Photon Counting Image Sensor | 박진구 |
| 2013-08 | Fabrication of 3D micro structure by dual diffuser lithography | 박진구 |
| 2012-03 | Fabrication of a hydrophobic/hydrophilic hybrid-patterned microarray chip and its application to a cancer marker immunoassay | 박진구 |
