2016-08 | The radio-frequency fluctuation effect on the floating harmonic method | 정진욱 |
2013-01 | Real time feedback control of plasma density using a floating probe in semiconductor processing | 정진욱 |
2015-12 | Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring | 정진욱 |
2012-02 | Real-time observation of the capacitance variation in a surface dielectric layer in radio frequency discharge | 정진욱 |
2015-04 | Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas | 정진욱 |
2015-07 | Relatively high plasma density in low pressure inductive discharges | 정진욱 |
2013-11 | Research of non-uniformity in 450 mm multi-electrode capacitive coupled plasma | 정진욱 |
2015-07 | Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)] | 정진욱 |
2015-12 | The sheath effect on the floating harmonic method | 정진욱 |
2013-02 | Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge | 정진욱 |
2015-12 | A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma | 정진욱 |
2017-01 | A study on plasma parameters in Ar/SF6 inductively coupled plasma | 정진욱 |
2014-08 | Study on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas | 정진욱 |
2013-09 | A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model | 정진욱 |
2017-05 | Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma | 정진욱 |
2017-04 | Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor | 정진욱 |
2018-07 | Transient voltage analysis on a series capacitor of the floating probe for plasma diagnostics | 정진욱 |
2013-10 | Transition of electron kinetics in weakly magnetized inductively coupled plasmas | 정진욱 |
2013-05 | Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas | 정진욱 |
2018-11 | Ultrathin gutter layer for high-performance thin-film composite membranes for CO2 separation | 정진욱 |
2013-02 | Understanding the Synthesis of Ethylene Glycol Pulsed Plasma Discharges | 정진욱 |
2012-04 | Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge | 정진욱 |
2013-07 | Wireless wafer-type probe system for measurement of two-dimensional plasma parameters and spatial uniformity | 정진욱 |
2012-04 | 유도 결합 플라즈마에서 플라즈마 변수와 전자 에너지 분포에 대한 극판 전력 인가의 영향 | 정진욱 |
2018-02 | 차량 애니메이션 저작도구 제작 | 정진욱 |