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Showing results 99 to 123 of 123

Issue DateTitleAuthor(s)
2016-08The radio-frequency fluctuation effect on the floating harmonic method정진욱
2013-01Real time feedback control of plasma density using a floating probe in semiconductor processing정진욱
2015-12Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring정진욱
2012-02Real-time observation of the capacitance variation in a surface dielectric layer in radio frequency discharge정진욱
2015-04Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas정진욱
2015-07Relatively high plasma density in low pressure inductive discharges정진욱
2013-11Research of non-uniformity in 450 mm multi-electrode capacitive coupled plasma정진욱
2015-07Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)]정진욱
2015-12The sheath effect on the floating harmonic method정진욱
2013-02Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge정진욱
2015-12A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma정진욱
2017-01A study on plasma parameters in Ar/SF6 inductively coupled plasma정진욱
2014-08Study on Plasma Uniformity Using 2-D Measurement Method in Argon Inductively Coupled Plasmas정진욱
2013-09A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model정진욱
2017-05Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma정진욱
2017-04Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor정진욱
2018-07Transient voltage analysis on a series capacitor of the floating probe for plasma diagnostics정진욱
2013-10Transition of electron kinetics in weakly magnetized inductively coupled plasmas정진욱
2013-05Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas정진욱
2018-11Ultrathin gutter layer for high-performance thin-film composite membranes for CO2 separation정진욱
2013-02Understanding the Synthesis of Ethylene Glycol Pulsed Plasma Discharges정진욱
2012-04Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge정진욱
2013-07Wireless wafer-type probe system for measurement of two-dimensional plasma parameters and spatial uniformity정진욱
2012-04유도 결합 플라즈마에서 플라즈마 변수와 전자 에너지 분포에 대한 극판 전력 인가의 영향정진욱
2018-02차량 애니메이션 저작도구 제작정진욱

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