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Relatively high plasma density in low pressure inductive discharges

Title
Relatively high plasma density in low pressure inductive discharges
Author
정진욱
Keywords
ELECTRON-ENERGY DISTRIBUTION; HEATING-MODE TRANSITION; COUPLED PLASMA; RF DISCHARGE; KINETICS; POWER
Issue Date
2015-07
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, v. 22, NO 9, Page. 1-2
Abstract
Electron energy probability functions (EEPFs) were measured in a low pressure argon inductive discharge. As radio frequency (RF) power increases, discharge mode is changed from E-mode (capacitively coupled) to H-mode (inductively coupled) and the EEPFs evolve from a bi-Maxwellian distribution to a Maxwellian distribution. It is found that the plasma densities at low RF powers (˂ 30W) are much higher than the density predicted from the slope of the densities at high powers. Because high portion of high energy electrons of the bi-Maxwellian distribution lowers the collisional energy loss and low electron temperature of low energy electrons reduces particle loss rate at low powers. Therefore, the energy loss of plasma decreases and electron densities become higher at low powers. (c) 2015 AIP Publishing LLC.
URI
http://aip.scitation.org/doi/abs/10.1063/1.4931470http://hdl.handle.net/20.500.11754/26328
ISSN
1070-664X; 1089-7674
DOI
10.1063/1.4931470
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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