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Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma

Title
Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
Author
정진욱
Keywords
HIGH-DENSITY; BOMBARDMENT; ARGON; PROBE
Issue Date
2017-05
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, v. 24, no. 5, Article no. 053510
Abstract
The two-dimensional temporal behavior of plasma was investigated at the wafer-level when applied power was turned on/off, which is one cycle of the pulsed plasma. For the measurement of transient plasma, the floating harmonic method and a post-processing method were used to obtain the ion flux and the electron temperature with a 1 ms time resolution. The results show that the transient behaviors of plasma such as antenna power absorption are observed in pulsed inductively coupled plasma. Antenna-shaped ion flux is observed when the power is turned on, and the radial profiles of the ion flux are followed by a diffusion solution when the power is turned off. Furthermore, the electron temperature shows pulsed plasma characteristics. Published by AIP Publishing.
URI
https://aip.scitation.org/doi/10.1063/1.4982815https://repository.hanyang.ac.kr/handle/20.500.11754/114100
ISSN
1070-664X; 1089-7674
DOI
10.1063/1.4982815
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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