Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
- Title
- Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
- Author
- 정진욱
- Keywords
- HIGH-DENSITY; BOMBARDMENT; ARGON; PROBE
- Issue Date
- 2017-05
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v. 24, no. 5, Article no. 053510
- Abstract
- The two-dimensional temporal behavior of plasma was investigated at the wafer-level when applied power was turned on/off, which is one cycle of the pulsed plasma. For the measurement of transient plasma, the floating harmonic method and a post-processing method were used to obtain the ion flux and the electron temperature with a 1 ms time resolution. The results show that the transient behaviors of plasma such as antenna power absorption are observed in pulsed inductively coupled plasma. Antenna-shaped ion flux is observed when the power is turned on, and the radial profiles of the ion flux are followed by a diffusion solution when the power is turned off. Furthermore, the electron temperature shows pulsed plasma characteristics. Published by AIP Publishing.
- URI
- https://aip.scitation.org/doi/10.1063/1.4982815https://repository.hanyang.ac.kr/handle/20.500.11754/114100
- ISSN
- 1070-664X; 1089-7674
- DOI
- 10.1063/1.4982815
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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