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Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor

Title
Time-resolved spatial distribution measurements of pulse-modulated argon plasmas in an inductively coupled plasma reactor
Author
정진욱
Keywords
pulse modulated plasma; plasma diagnostics; plasma parameter; plasma distribution; plasma uniformity; inductively coupled plasma
Issue Date
2017-04
Publisher
IOP PUBLISHING LTD
Citation
PLASMA SOURCES SCIENCE & TECHNOLOGY, v. 26, no. 5, Article no. 055016
Abstract
The time variation of the plasma parameters along with their spatial distributions were measured in pulse-modulated (PM) inductively coupled argon plasma via the phase delay harmonic analysis method (PDHAM). During the initial active-glow, the distributions of both the ion flux and the electron temperature in the plasma bulk have M-shaped profiles due to the antenna geometry. Then, while the plasma is approaching a steady state, the spatial distribution evolves into a profile with a convex shape. The effects of the antenna geometry and the time evolution on the distribution profile are lesser under low gas pressure, and diminish at the wafer level. The diffusion of the charged particles and the nonlocal electron kinetics account for these characteristics. It is observed that the initial distribution of the electron temperature is affected by the electron density distribution of the previous after-glow at the wafer level. The distribution profiles at different pulse frequencies were also measured. At higher pulse frequencies, the distribution profile is more frequently smoothed by diffusion during the after-glow, leading to higher uniformity.
URI
https://iopscience.iop.org/article/10.1088/1361-6595/aa61c2https://repository.hanyang.ac.kr/handle/20.500.11754/113752
ISSN
0963-0252; 1361-6595
DOI
10.1088/1361-6595/aa61c2
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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