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A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma

Title
A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma
Author
정진욱
Keywords
ELECTRON-ENERGY-DISTRIBUTION; MODE TRANSITION; LARGE-AREA; MAGNETIC-FIELD; RF DISCHARGES; 13.56 MHZ; FREQUENCY; EFFICIENCY; ANTENNA; ARGON
Issue Date
2015-12
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, v. 22, NO 12, Article number 123504, Page. 1-6
Abstract
In a plasma discharge system, the power loss at powered line, matching network, and other transmission line can affect the discharge characteristics such as the power transfer efficiency, voltage and current at powered electrode, and plasma density. In this paper, we propose a method to reduce power loss by using a step down transformer mounted between the matching network and the powered electrode in a capacitively coupled argon plasma. This step down transformer decreases the power loss by reducing the current flowing through the matching network and transmission line. As a result, the power transfer efficiency was increased about 5%-10% by using a step down transformer. However, the plasma density was dramatically increased compared to no transformer. This can be understood by the increase in ohmic heating and the decrease in dc-self bias. By simply mounting a transformer, improvement of discharge efficiency can be achieved in capacitively coupled plasmas. (C) 2015 AIP Publishing LLC.
URI
http://aip.scitation.org/doi/10.1063/1.4936951http://hdl.handle.net/20.500.11754/30036
ISSN
1070-664X; 1089-7674
DOI
10.1063/1.4936951
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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