2011-03 | Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas | 정진욱 |
2012-12 | Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge | 정진욱 |
2014-07 | Colorimetric polydiacetylene for plasma diagnostics | 정진욱 |
2012-12 | Comparisons of the electrical characteristics by impedance matching conditions on the E-H and H-E transition and the hysteresis of inductively coupled plasma | 정진욱 |
2018-05 | Compensation of the sheath effects in cylindrical floating probes | 정진욱 |
2020-07 | Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma | 정진욱 |
2014-09 | Control of electron energy distribution by adding a pulse inductive field in capacitive discharge | 정진욱 |
2013-05 | Control of plasma density distribution via wireless power transfer in an inductively coupled plasma | 정진욱 |
2015-03 | Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting | 정진욱 |
2015-03 | Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting | 정진욱 |
2015-07 | Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma | 정진욱 |
2016-06 | Control of the floating potential using dual-frequency | 정진욱 |
2021-02 | Control of the spatial distribution of ion flux in dual inductively coupled plasmas | 정진욱 |
2015-08 | Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas | 정진욱 |
2021-02 | Correlation of RF impedance with Ar plasma parameters in semiconductor etch equipment using inductively coupled plasma | 정진욱 |
2011-06 | Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy | 정진욱 |
2011-05 | Development of Ferrite-Enhanced Side-Type Inductively Coupled Plasma | 정진욱 |
2016-06 | Discharge dynamics and plasma density recovery by on/off switches of additional gas | 정진욱 |
2013-06 | Discharge mode transition and hysteresis in inductively coupled plasma | 정진욱 |
2012-05 | Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas | 정진욱 |
2015-03 | E-H heating mode transition in inductive discharges with different antenna sizes | 정진욱 |
2011-04 | E-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gas | 정진욱 |
2012-05 | Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmas | 정진욱 |
2013-10 | Effect of antenna size on electron kinetics in inductively coupled plasmas | 정진욱 |
2011-01 | Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films | 정진욱 |
2011-01 | Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films | 정진욱 |
2015-07 | Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling | 정진욱 |
2015-10 | Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling | 정진욱 |
2020-06 | Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna | 정진욱 |
2012-04 | Effect of helium on spatial plasma parameters in low pressure argon-helium plasma | 정진욱 |