Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmas
- Title
- Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmas
- Author
- 정진욱
- Issue Date
- 2012-05
- Publisher
- American Institute of Physics
- Citation
- Journal of Applied Physics, 2012, 111(9)
- Abstract
- Electron energy distribution functions (EEDFs) of low pressure O2 plasma were measured by adding small amount of coil power in a capacitive discharge. When the plasma was generated by bias power only, the measured EEDF showed a bi-Maxwellian distribution. However, when a very small coil power (a few Watts) was added, the EEDF evolved abruptly into a Maxwellian distribution, while the electron density was decreased. In an Ar/O2 mixture discharge, this EEDF evolution to the Maxwellian was also observed at a relatively higher coil power. This abrupt change in EEDFs with a very small coil power appears to be attributed to a combined effect of collisionless heating by capacitive and induced electric fields.
- URI
- https://aip.scitation.org/doi/abs/10.1063/1.4705362?journalCode=japhttps://repository.hanyang.ac.kr/handle/20.500.11754/74881
- ISSN
- 0021-8979
- DOI
- 10.1063/1.4705362
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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