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Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma

Title
Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma
Author
정진욱
Keywords
Inductively coupled plasma (ICP); spatial plasma distribution; wireless power transfer
Issue Date
2015-07
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
IEEE TRANSACTIONS ON PLASMA SCIENCE, v. 43, no. 8, Page. 2766-2767
Abstract
In this paper, numerical calculations of the surface coil current and the spatial electric field in the vicinity of the antenna were investigated using wireless power transfer method. It is observed that the wirelessly transferred power to a resonant coil is dramatically changed with a variation of the excitation frequency. This result indicates that the spatial plasma distribution can be controlled through wireless resonance power transfer. This method could be applied to the large-area plasma source.
URI
http://ieeexplore.ieee.org/document/7151841/http://hdl.handle.net/20.500.11754/26399
ISSN
0093-3813; 1939-9375
DOI
10.1109/TPS.2015.2445936
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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