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Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling

Title
Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling
Author
정진욱
Keywords
CALCULATED CROSS-SECTIONS; RF DISCHARGE; IMPACT IONIZATION; GLOBAL-MODEL; ARGON ATOMS; TRANSITION; GENERATION; SCATTERING
Issue Date
2015-07
Publisher
NATURE PUBLISHING GROUP
Citation
SCIENTIFIC REPORTS, v. 5, Page. 1-2
Abstract
Hysteresis, which is the history dependence of physical systems, is one of the most important topics in physics. Interestingly, bi- stability of plasma with a huge hysteresis loop has been observed in inductive plasma discharges. Despite long plasma research, how this plasma hysteresis occurs remains an unresolved question in plasma physics. Here, we report theory, experiment, and modeling of the hysteresis. It was found experimentally and theoretically that evolution of the electron energy distribution ( EED) makes a strong plasma hysteresis. In Ramsauer and non- Ramsauer gas experiments, it was revealed that the plasma hysteresis is observed only at high pressure Ramsauer gas where the EED deviates considerably from a Maxwellian shape. This hysteresis was presented in the plasma balance model where the EED is considered. Because electrons in plasmas are usually not in a thermal equilibrium, this EED- effect can be regarded as a universal phenomenon in plasma physics.
URI
http://www.nature.com/articles/srep15254http://hdl.handle.net/20.500.11754/26327
ISSN
2045-2322
DOI
10.1038/srep15254
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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