Effect of helium on spatial plasma parameters in low pressure argon-helium plasma
- Title
- Effect of helium on spatial plasma parameters in low pressure argon-helium plasma
- Author
- 정진욱
- Keywords
- argon; helium; Langmuir probes; plasma collision processes; plasma density; plasma heating; plasma pressure; plasma transport processes; probability
- Issue Date
- 2012-04
- Publisher
- AMER INST PHYSICS, CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA
- Citation
- APPLIED PHYSICS LETTERS, 100 ,16, 164107
- Abstract
- Spatial distributions of the electron energy probability function were measured using a Langmuir probe in side-type argon-helium inductively coupled plasma. Collisional dominated electron heating and a concave shape of plasma density profile were observed at 10 mTorr pure argon. As the helium proportion increased, the electron heating and density profile changed to collisionless dominated heating and a convex shape respectively, and the same tendency was shown when the pressure decreased in the pure argon plasma. These changes were due to the decrease in the e-n collision frequency and the expansion of the electron power dissipation region. (C) 2012 American Institute of Physics. [http://dx.doi.org.access.hanyang.ac.kr/10.1063/1.3703608]http://dx.doi.org.access.hanyang.ac.kr/10.1063/1.3703608
- URI
- http://aip.scitation.org/doi/abs/10.1063/1.3703608http://hdl.handle.net/20.500.11754/37597
- ISSN
- 0003-6951
- DOI
- 10.1063/1.3703608
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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