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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 11-20 of 31 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2004-12
Nonlinear effects on bremsstrahlung emission in dusty plasmas
정영대
2004-11
A study of process parameter control for nanopattern
오혜근
2004-11
Aerial Image Characterization for Defects in an Extreme-Ultraviolet Mask
김옥경
2004-11
Aerial image characterization for defects in an extreme-ultraviolet mask
오혜근
2004-12
극자외선 리소그래피에서 마스크 결함에 의한 이미지 특징
오혜근
2004-12
염소를 포함한 액체에서의 금박막 패터닝과 표면 분석
김옥경
2004-12
극자외선 리소그래피에서 마스크 결함에 의한 이미지 특징
김옥경
2004-12
실시간 분광 엘립소메트리를 이용한 a-Si박막의 crystallization 현상 연구
김옥경
2004-08
Photoinduced patterning of gold thin film
오혜근
2004-09
Anisotropic dielectric properties in epitaxial Bi3.25La0.75Ti3O12 thin films along different crystal directions
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Lithography
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EUV mask
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Chemically amplified resist
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DEPOSITION
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EUV lithography
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Lithography simulation
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Multilayer defect
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retention
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absorber
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Absorption
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