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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 12 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2004-05
Simple 157-nm interference illumination system for pattern formation
오혜근
2004-05
Exposure simulation of electron beam microcolumn lithography
오혜근
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2004-04
Simulation benchmarking for the whole resist process
오혜근
2004-11
Bulk effects of the thermal flow resists
오혜근
2004-11
A study of process parameter control for nanopattern
오혜근
2004-11
Aerial image characterization for defects in an extreme-ultraviolet mask
오혜근
2004-12
극자외선 리소그래피에서 마스크 결함에 의한 이미지 특징
오혜근
2004-08
Photoinduced patterning of gold thin film
오혜근
2004-11
Angular dependency of off-axis illumination on 100 nm width pattern printability for extreme ultraviolet lithography: Ru/Mo/Si reflector system
오혜근
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Lithography
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EUV mask
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Chemically amplified resist
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EUV lithography
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Lithography simulation
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Multilayer defect
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absorber
1
Absorption
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Aerial image
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Aerialimage
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