| 2020-03 | Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas | 정진욱 |
| 2017-02 | Effect of remote inductively coupled plasma (ICP) on the electron energy probability function of an in-tandem main ICP | 정진욱 |
| 2015-01 | Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas | 정진욱 |
| 2020-09 | Effect of the RF bias on the plasma density in an argon inductively coupled plasma | 정진욱 |
| 2016-11 | Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas | 정진욱 |
| 2013-08 | Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma | 정진욱 |
| 2011-01 | Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma | 정진욱 |
| 2020-08 | Electrical and plasma characterization of a hybrid plasma source combined with inductively coupled and capacitively coupled plasmas for O atom generation | 정진욱 |
| 2012-01 | Electrical test method using high density plasmas for high-end printed circuit boards | 정진욱 |
| 2012-05 | Electromagnetically Coupled Resonators Using Toroidal Ferrite Core for wireless power transfer | 정진욱 |
| 2013-08 | Electron density and electron temperature measurement in a bi-Maxwellian electron distribution using a derivative method of Langmuir probes | 정진욱 |
| 2011-07 | Electron energy flux control using dual power in side-type inductively coupled plasma | 정진욱 |
| 2015-02 | Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing | 정진욱 |
| 2014-07 | Enhanced Plasma Uniformity in RF Plasma With Side Multihole | 정진욱 |
| 2014-01 | Erratum: Method for the measurement of transferred power to plasma in inductive discharges (Thin Solid Films (2013) 547 (9-12)) | 정진욱 |
| 2017-01 | Evolution of electron temperature in inductively coupled plasma | 정진욱 |
| 2011-11 | Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma | 정진욱 |
| 2018-05 | Evolution of two-dimensional plasma parameters in the plane of the wafer during the E- to H- and H- to E-mode transition in an inductively coupled plasma | 정진욱 |
| 2016-10 | Experimental and Theoretical Investigation on the Scale-Up of a Plasma Reactor | 정진욱 |
| 2019-11 | Experimental comparative analysis on series and parallel antenna in an inductively coupled plasma | 정진욱 |
| 2017-12 | Experimental investigation of edge-to-center density ratio in E-H mode transition of an inductively coupled plasma | 정진욱 |
| 2015-07 | Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma | 정진욱 |
| 2019-09 | Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma | 정진욱 |
| 2019-08 | Experimental investigation on the spatial distribution of floating potential at the wafer-level in inductively coupled oxygen plasma | 정진욱 |
| 2016-06 | Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma | 정진욱 |
| 2020-10 | Experimental observation of the effect of electron attachment and detachment reactions on the electron energy distribution in an inductive oxygen discharge | 정진욱 |
| 2012-05 | Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias | 정진욱 |
| 2015-02 | Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas | 정진욱 |
| 2013-03 | Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases | 정진욱 |
| 2016-12 | Global model including multistep ionizations in helium plasmas | 정진욱 |
