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Global model including multistep ionizations in helium plasmas

Title
Global model including multistep ionizations in helium plasmas
Author
정진욱
Keywords
ELECTRON-ENERGY DISTRIBUTION; INDUCTIVELY-COUPLED PLASMA; HIGH-DENSITY; DISCHARGE
Issue Date
2016-12
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, v. 23, Issue 12, No. 123508
Abstract
Particle and power balance equations including stepwise ionizations are derived and solved in helium plasmas. In the balance equations, two metastable states (2(1)S(1) in singlet and 2(3)S(1) triplet) are considered and the followings are obtained. The plasma density linearly increases and the electron temperature is relatively in a constant value against the absorbed power. It is also found that the contribution to multi-step ionization with respect to the single-step ionization is in the range of 8%-23%, as the gas pressure increases from 10 mTorr to 100 mTorr. Compared to the results in the argon plasma, there is little variation in the collisional energy loss per electron-ion pair created (epsilon(c)) with absorbed power and gas pressure due to the small collision cross section and higher inelastic collision threshold energy. Published by AIP Publishing.
URI
https://aip.scitation.org/doi/10.1063/1.4969089https://repository.hanyang.ac.kr/handle/20.500.11754/101844
ISSN
1070-664X; 1089-7674
DOI
10.1063/1.4969089
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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