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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-10 of 68 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2008-09
Optimum Biasing for 45 nm Node Chromeless and Attenuated Phase Shift Mask
오혜근
2008-10
Selective Growth of Vertical and Horizontal ZnO Nanowires for Device Applications
정희준
2008-10
Noise Properties of Coherent Tunneling Processes in Resonant Interband Tunneling Diode
정희준
2008-11
Heat conduction to photoresist on top of wafer during post exposure bake process: I. Numerical Approach
오혜근
2008-11
A mask generation approach to double patterning technology with inverse lithography
오혜근
2008-05
Application of ellipsometry in immersion lithography
오혜근
2008-05
Interpretation of nanoscale conducting paths and their control in nickel oxide (NiO) thin films
강보수
2008-11
Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process
정희준
2008-11
Influence of Various Defects on Extreme Ultra-Violet Mask
오혜근
2008-11
Acid diffusion length dependency for 32 nm node attenuated and chromeless phase shift mask
오혜근
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-Author
23
오혜근
21
정영대
11
정희준
8
강보수
2
권영헌
2
홍주유
1
김옥경
-Subject
6
32 nm line and space half-pitch
6
lithography
6
Navier-Stokes equation
5
Resist reflow process
5
resist reflow process
4
optical proximity correction
3
haze
3
pellicle
2
22 nm node
2
22 nm pattern
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