Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 141 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2007-08
32nm Pattern Collapse Modeling with Radial Distance and Rinse Speed
오혜근
2007-08
Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer
오혜근
2007-09
Acid diffusion length limitation for 45 nm node attenuated and chromeless phase shift mask
오혜근
2007-09
Critical dimension control for 32 nm random contact hole array with resist reflow process
오혜근
2007-09
Which Mask is Preferred for Sub-60 nm Node Imaging?
오혜근
2007-09
Photoresist Adhesion Effect of Resist Reflow Process
오혜근
2007-10
Process Extension Techniques for Optical Lithography: Thermal Treatment, Polarization and Double Patterning
오혜근
2006-02
EUV lithography simulation for the 32 nm node
오혜근
2006-02
Reflow modeling for elongated contact hole shape
오혜근
2006-02
Simulation of mask induced polarization effect on imaging in immersion lithography
오혜근
previous
1
2
3
4
...
next
next
Discover
-Subject
5
EUVL
5
Navier-Stokes equation
4
Contact hole
3
32 nm line and space half-pitch
3
32 nm node
3
calibration
3
chemically amplified resist
3
haze
3
lithography simulation
3
MEEF
< previous
next >
-Date issued
2
2009
23
2008
14
2007
18
2006
20
2005
12
2004
20
2003
19
2002
9
2001
4
2000
next >
BROWSE
Communities & Collections
Titles
Authors