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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 91-100 of 172 (Search time: 0.005 seconds).
Item hits:
Issue Date
Title
Author(s)
2017-02
Thermal analysis of extreme ultraviolet pellicle with metallic coatings
오혜근
2016-01
Impact of a deformed extreme ultraviolet pellicle in terms of the critical dimension uniformity
오혜근
2017-12
thermo-optical optimization of extreme-ultraviolet pellicles for future generations
오혜근
2017-01
Impact of transmission non-uniformity of a wrinkled EUV pellicle for N5 patterning under various illuminations
오혜근
2007-01
Acid Diffusion Length Corresponding to Post Exposure Bake Time and Temperature
오혜근
2007-01
Theoretical investigation of pattern printability of oxidized Si and Ru capping models for extreme ultraviolet lithography (EUVL)
오혜근
2017-10
Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle
오혜근
2015-04
Patterning dependence on the mask defect for extreme ultraviolet lithography
오혜근
2016-08
Anisotropic shadow effects with various pattern directions in an anamorphic high numerical aperture system
오혜근
2007-02
32 nm pattern collapse modeling with radial distance and rinse speed
오혜근
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-Subject
20
Lithography
9
EUV lithography
9
lithography
8
ellipsometry
8
EUVL
7
EUV mask
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
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2020 - 2021
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2010 - 2019
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2000 - 2009
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1999 - 1999
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