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thermo-optical optimization of extreme-ultraviolet pellicles for future generations

Title
thermo-optical optimization of extreme-ultraviolet pellicles for future generations
Author
오혜근
Keywords
pellicle; extreme ultraviolet; stress; film; finite element method; LITHOGRAPHY
Issue Date
2017-12
Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Citation
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v. 16, No. 4, Article no. 041014
Abstract
The thermo-optical optimization of extreme-ultraviolet pellicles for 3 nm node or smaller is described. Various material and multilayer structure candidates for the optimized pellicles are simulated using a finite element method. The result shows that a silicon-cored pellicle has relatively high transmission, whereas a graphene-cored pellicle shows relatively low stress compared with its material tensile strength. (c) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
URI
https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-16/issue-4/041014/Thermo-optical-optimization-of-extreme-ultraviolet-pellicles-for-future-generations/10.1117/1.JMM.16.4.041014.fullhttp://repository.hanyang.ac.kr/handle/20.500.11754/72677
ISSN
1932-5150; 1932-5134
DOI
10.1117/1.JMM.16.4.041014
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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