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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 71-80 of 172 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2008-02
The study of attenuated PSM structure for extreme ultra violet lithography with minimized mask shadowing effect(
오혜근
2008-02
Optimum biasing for 45 nm node chromeless and attenuated phase shift mask
오혜근
2008-02
32 nm 1:1 line and space patterning by resist reflow process
오혜근
2008-02
22 nm node contact hole formation in extreme ultra-violet lithography
오혜근
2008-02
Resist reflow process for arbitrary 32 nm node pattern
오혜근
2008-02
Critical dimension control for 32 nm node random contact hole array using resist reflow process
오혜근
2016-04
Eco-friendly photolithography using water-developable pure silk fibroin
오혜근
2018-05
modeling of thermomechanical changes of euv mask and their dependence on absorber variation
오혜근
2008-06
Anisotropic resist reflow process simulation for 22 nm elongated contact holes
오혜근
2006-06
Mask haze measurement by spectroscopic ellipsometry
오혜근
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-Subject
20
Lithography
9
EUV lithography
9
lithography
8
ellipsometry
8
EUVL
7
EUV mask
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
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-Date issued
2
2020 - 2021
27
2010 - 2019
141
2000 - 2009
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1999 - 1999
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