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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 172 (Search time: 0.003 seconds).
Item hits:
Issue Date
Title
Author(s)
2007-08
32nm Pattern Collapse Modeling with Radial Distance and Rinse Speed
오혜근
2007-08
Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer
오혜근
2007-09
Acid diffusion length limitation for 45 nm node attenuated and chromeless phase shift mask
오혜근
2007-09
Critical dimension control for 32 nm random contact hole array with resist reflow process
오혜근
2007-09
Which Mask is Preferred for Sub-60 nm Node Imaging?
오혜근
2007-09
Photoresist Adhesion Effect of Resist Reflow Process
오혜근
2007-10
Process Extension Techniques for Optical Lithography: Thermal Treatment, Polarization and Double Patterning
오혜근
2006-02
EUV lithography simulation for the 32 nm node
오혜근
2006-02
Reflow modeling for elongated contact hole shape
오혜근
2006-02
Simulation of mask induced polarization effect on imaging in immersion lithography
오혜근
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Lithography
9
EUV lithography
9
lithography
8
ellipsometry
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EUVL
7
EUV mask
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
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2020 - 2021
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2010 - 2019
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2000 - 2009
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1999 - 1999
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