A single zone azimuth calibration for rotating compensator multichannel ellipsometry
- Title
- A single zone azimuth calibration for rotating compensator multichannel ellipsometry
- Author
- 김옥경
- Keywords
- multichannel; spectroscopic; ellipsometry; calibration
- Issue Date
- 2003-05
- Publisher
- INST PURE APPLIED PHYSICS
- Citation
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, v. 42, issue. 5, page. 2872-2875
- Abstract
- A rotating compensator type spectroscopic ellipsometry (RCSE) equipped with a multichannel detector was developed. For accurate data reduction, the azimuth of each optical element should be determined with respect to the plane of incidence. In this paper, we present a spectroscopic single-zone phase calibration method for RCSE utilizing multichannel measurements. With this method, the azimuth of the polarizer could be determined as accurately as in the two-zone phase method, but the time required for calibration process was reduced by half.
- URI
- https://iopscience.iop.org/article/10.1143/JJAP.42.2872https://repository.hanyang.ac.kr/handle/20.500.11754/155783
- ISSN
- 0021-4922
- DOI
- 10.1143/jjap.42.2872
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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