Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김옥경 | - |
dc.date.accessioned | 2020-11-24T04:47:36Z | - |
dc.date.available | 2020-11-24T04:47:36Z | - |
dc.date.issued | 2003-05 | - |
dc.identifier.citation | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, v. 42, issue. 5, page. 2872-2875 | en_US |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | https://iopscience.iop.org/article/10.1143/JJAP.42.2872 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/155783 | - |
dc.description.abstract | A rotating compensator type spectroscopic ellipsometry (RCSE) equipped with a multichannel detector was developed. For accurate data reduction, the azimuth of each optical element should be determined with respect to the plane of incidence. In this paper, we present a spectroscopic single-zone phase calibration method for RCSE utilizing multichannel measurements. With this method, the azimuth of the polarizer could be determined as accurately as in the two-zone phase method, but the time required for calibration process was reduced by half. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | INST PURE APPLIED PHYSICS | en_US |
dc.subject | multichannel | en_US |
dc.subject | spectroscopic | en_US |
dc.subject | ellipsometry | en_US |
dc.subject | calibration | en_US |
dc.title | A single zone azimuth calibration for rotating compensator multichannel ellipsometry | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1143/jjap.42.2872 | - |
dc.relation.journal | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & | - |
dc.contributor.googleauthor | An, L | - |
dc.contributor.googleauthor | Lee, J | - |
dc.contributor.googleauthor | Bang, KY | - |
dc.contributor.googleauthor | Kim, OK | - |
dc.contributor.googleauthor | Oh, HK | - |
dc.relation.code | 2012204500 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
dc.sector.department | DEPARTMENT OF APPLIED PHYSICS | - |
dc.identifier.pid | 1790146 | - |
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