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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
877
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-Author
358
정영대
171
오혜근
115
권영헌
55
강보수
50
정희준
34
손승우
27
김옥경
17
정재기
15
이미진
15
허지혁
-Subject
27
Lithography
13
Lithography simulation
12
lithography
11
ellipsometry
10
Resist reflow process
9
EUV lithography
9
Navier-Stokes equation
8
atomic processes
8
EUVL
8
plasmas
-Date issued
95
2020 - 2024
294
2010 - 2019
480
2000 - 2009
7
1999 - 1999
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877
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