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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 21-30 of 68 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2008-02
Optimum dose variation caused by post exposure bake temperature difference inside photoresist over different sublayers and thickness
오혜근
2008-02
The study of attenuated PSM structure for extreme ultra violet lithography with minimized mask shadowing effect(
오혜근
2008-02
Optimum biasing for 45 nm node chromeless and attenuated phase shift mask
오혜근
2008-02
32 nm 1:1 line and space patterning by resist reflow process
오혜근
2008-02
22 nm node contact hole formation in extreme ultra-violet lithography
오혜근
2008-02
Resist reflow process for arbitrary 32 nm node pattern
오혜근
2008-12
Shot Noise Suppression in SiGe Resonant Interband Tunneling Diodes
정희준
2008-12
단결정과 다결정 GaN Nanowire의 저주파 노이즈 특성
정희준
2008-12
극저온 고주파 노이즈 증폭 시스템 개발
정희준
2008-12
E-beam Lithography를 이용한 3차원 Air-bridge 구조의 제작기법
정희준
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-Author
23
오혜근
21
정영대
11
정희준
8
강보수
2
권영헌
2
홍주유
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김옥경
-Subject
6
32 nm line and space half-pitch
6
lithography
6
Navier-Stokes equation
5
Resist reflow process
5
resist reflow process
4
optical proximity correction
3
haze
3
pellicle
2
22 nm node
2
22 nm pattern
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