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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-10 of 20 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2005-04
Reduction of the Absorber Shadow Effect by Changing the Absorber Side Wall Angle in Extreme Ultraviolet Lithography
오혜근
2005-06
ArF photoresist parameter optimization for mask error enhancement factor reduction
오혜근
2005-05
The evaluation of aberration effects according to pattern shape and duty ratio
오혜근
2005-03
Contact hole reflow by finite element method
오혜근
2005-05
Simulation of thermal resist flow process
오혜근
2005-03
Line width variation with absorber thickness in extreme ultraviolet lithography
오혜근
2005-12
Rigorous coupled-wave analysis를 이용한 극자외선 리소그래피에서 그림자 효과를 줄이기 위한 마스크 변형
오혜근
2005-06
Bulk effects of thermal flow resists
오혜근
2005-06
Calibration-Free Multichannel Ellipsometry for Retardance Measurement
오혜근
2005-11
Defect characterization of Ru/Mo/Si EUV reflector by optical modeling
오혜근
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MEEF
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ArF
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EUV lithography
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Lithography
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Lithography simulation
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Simulation
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Aerial image
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aerial image
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aerial image characteristics
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Chemically amplified resist
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