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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 11-20 of 77 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2006-02
Evaluation of partial coherent imaging using the transfer function in immersion lithography
오혜근
2006-02
Numerical modeling of absorber characteristics for EUVL
오혜근
2006-02
The effect of transmission reduction by reticle haze formation
오혜근
2006-01
Optical lithography simulator for the whole resist process
오혜근
2006-02
Optimization of chromeless phase mask by comparing scattering bars with zebra patterns
오혜근
2006-02
Mask error enhancement factor variation with pattern density for 65 nm and 90 nm line widths
오혜근
2006-02
Improvement of column spacer uniformity in a TFT LCD panel
오혜근
2005-04
Reduction of the Absorber Shadow Effect by Changing the Absorber Side Wall Angle in Extreme Ultraviolet Lithography
오혜근
2006-11
Investigation of optimum biasing and undercut for single trench alternating phase shift mask in 193 nm lithography
오혜근
2006-11
Chromeless phase lithography using scattering bars and zebra patterns
오혜근
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-Subject
8
lithography
6
Lithography
6
Resist reflow process
5
EUVL
5
Navier-Stokes equation
4
Contact hole
4
ellipsometry
4
Lithography simulation
3
32 nm line and space half-pitch
3
32 nm node
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-Date issued
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2009
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