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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-7 of 7 (Search time: 0.003 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-02
EUV lithography simulation for the 32 nm node
오혜근
2005-04
Reduction of the Absorber Shadow Effect by Changing the Absorber Side Wall Angle in Extreme Ultraviolet Lithography
오혜근
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2017-06
Influence of a non-ideal sidewall angle of extreme ultra-violet mask absorber for 1×-nm patterning in isomorphic and anamorphic lithography
오혜근
2004-11
Aerial image characterization for defects in an extreme-ultraviolet mask
오혜근
2018-06
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
오혜근
2004-06
Effect of Extreme Ultraviolet Light Scattering from the Rough Absorber and Buffer Side Wall
오혜근
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EUV lithography
2
Multilayer defect
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32 nm node
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Absorber
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absorber
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Aerial image
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aerial image
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Aerialimage
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buffer
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Cleaning
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-Date issued
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2010 - 2018
5
2004 - 2009
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