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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-10 of 21 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2015-08
Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas
정진욱
2015-01
Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas
정진욱
2015-03
E-H heating mode transition in inductive discharges with different antenna sizes
정진욱
2015-04
Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas
정진욱
2015-02
Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing
정진욱
2015-03
Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting
정진욱
2015-03
Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting
정진욱
2015-02
Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas
정진욱
2015-04
On uniform plasma generation for the large area plasma processing in intermediate pressures
정진욱
2015-07
Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling
정진욱
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-Subject
4
RF DISCHARGE
3
DENSITY
3
ELECTRON-ENERGY DISTRIBUTION
3
GLOBAL-MODEL
3
POWER
2
ANTENNA
2
AR
2
ARGON
2
ARGON ATOMS
2
CALCULATED CROSS-SECTIONS
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