Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas

Title
Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas
Author
정진욱
Keywords
Boltzmann equations; Electric measurements; Antennas; Plasma confinement; Coils
Issue Date
2015-02
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v. 106, NO 7, Page. 1-3
Abstract
The radial profiles of the electron density at the bottom wall were measured from the center to the edge at argon 3 mTorr with an RF power of 200 W. Since the Boltzmann relation in terms of the fluid picture only describes the behavior of the confined particles, the escaping electrons, which are not confined in plasmas, were not expected to follow the Boltzmann relation. However, unexpected results were observed. The spatial profiles of the density of escaping electrons and the floating potential were well described by the Boltzmann relation with the electron temperature. Moreover, it was concluded that the behavior of the escaping electrons is also described by the generalized Boltzmann relation in terms of the kinetic model. (C) 2015 AIP Publishing LLC.
URI
http://scitation.aip.org/content/aip/journal/apl/106/7/10.1063/1.4906575http://hdl.handle.net/20.500.11754/22137
ISSN
0003-6951; 1077-3118
DOI
10.1063/1.4906575
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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