Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas

Title
Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas
Authors
정진욱
Keywords
HIGH-POWER; ELECTRONEGATIVITY; DENSITY; TRANSFORMER; TERMINATION; ANTENNA
Issue Date
2015-04
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, v. 22, NO 4, Page. 1-8
Abstract
The electrical characteristics and the spatial distribution of oxygen plasma according to the number of turns in ferrite inductively coupled plasmas (ferrite ICPs) are investigated. Through a new ICP model, which includes the capacitive coupling and the power loss of the ferrite material with the conventional ICP model, the variation of the oxygen discharge characteristics depending on the number of turns is simply understood by the electrical measurement, such as the antenna voltages and the currents. As the number of the turns increases, the capacitive coupling dominantly affects the spatial plasma distribution. This capacitive coupling results in a center focused density profile along the radial direction. In spite of the same discharge conditions (discharge chamber, neutral gas, and pressure), the spatial plasma distribution over 450mm has drastic changes by increasing number of the turns. In addition, the effect of the negative species to the density profile is compared with the argon discharge characteristics at the same discharge configuration. (C) 2015 AIP Publishing LLC.
URI
http://scitation.aip.org/content/aip/journal/pop/22/4/10.1063/1.4916957http://hdl.handle.net/20.500.11754/23909
ISSN
1070-664X; 1089-7674
DOI
http://dx.doi.org/10.1063/1.4916957
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ETC
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