Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

Title
Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas
Author
정진욱
Keywords
PARAMETERS; GLOBAL-MODEL; VOLUME-AVERAGED MODEL; MULTISTEP IONIZATIONS; OXYGEN DISCHARGES; AR
Issue Date
2015-01
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, Volume 22, Issue 1, Page. 013501/4
Abstract
The total energy lost per electron-ion pair lost epsilon(T) is investigated with the electron energy distribution function (EEDF). The EEDFs are measured at various argon powers in RF inductively coupled plasma, and the EEDFs show a depleted distribution (a discontinuity occurring at the minimum argon excitation threshold energy level) with the bulk temperature and the tail temperature. The total energy loss per electron-ion pair lost epsilon(T) is calculated from a power balance model with the Maxwellian EEDFs and the depleted EEDFs and then compared with the measured epsilon(T) from the floating probe. It is concluded that the small population of the depleted high energy electrons dramatically increases the collisional energy loss, and the calculated epsilon(T) from the depleted EEDFs has a value that is similar to the measured epsilon(T). (C) 2015 AIP Publishing LLC.
URI
http://hdl.handle.net/20.500.11754/21468http://aip.scitation.org/doi/10.1063/1.4905515
ISSN
1070-664X
DOI
10.1063/1.4905515
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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