Characteristics of Negative Electron Beam Resists, ma-N2410 and ma-N2405

Abstract

We have characterized the electron beam lithography (EBL) properties of the new negative tone resists, ma-N2410 and ma-N2405. 2 These negative resists reacts under low electron dose values from 10 to 140 mu C/cm(2), tested using 10, 20, 28 keV electron beam. There was negligible loss of pattern height, which was attributed to the combined dose of the incident electron beam and the backscattered electrons. Experimental tests were performed under various EBL writing conditions of dose value, developing time, line-width and resist thickness. Our investigation showed that these new commercially available resists have high resolution and high contrast with non-chemical amplification, useful for micro-fabrication application. (c) 2007 Elsevier B.V. All rights reserved.