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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 111-120 of 171 (Search time: 0.004 seconds).
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Issue Date
Title
Author(s)
2009-11
Heat conduction from hot plate to photoresist on top of wafer including heat loss to the environment
오혜근
2003-12
복합적인 레지스트 패턴 붕괴현상의 역학적 해석
오혜근
2003-12
거친 표면을 가진 흡수체와 버퍼의 측면에 의한 극자외선 산란효과
오혜근
2003-12
Ellipsometry 에서의 calibration 및 입사면 고정형 ellipsometer
오혜근
2003-03
Optical Properties of the SiO-Co Composite Thin Films
오혜근
2002-10
Bulk Image Formation of Scalar Modeling in a Photoresist
오혜근
2004-08
Photoinduced patterning of gold thin film
오혜근
2002-12
Process Study of a 200 nm Laser Pattern Generator
오혜근
2002-12
Resist distribution effect of spin coating
오혜근
2002-06
Sensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical Dimension
오혜근
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-Subject
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Lithography
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EUV lithography
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lithography
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ellipsometry
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EUVL
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EUV mask
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Simulation
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Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
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2020 - 2021
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2010 - 2019
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