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Bulk Image Formation of Scalar Modeling in a Photoresist

Title
Bulk Image Formation of Scalar Modeling in a Photoresist
Author
오혜근
Keywords
Aerial image; Projection lens system; Bulk image; Scalar model; Vertical propagation; Defocus model; Acid distribution; CAR
Issue Date
2002-10
Publisher
KOREAN PHYSICAL SOC(한국물리학회)
Citation
Journal of The Korean Physical Society, v. 41, no. 4, page. 456-460
Abstract
Most people consider bulk images of chemically amplied resists (CAR) are to be the same as those of non-CAR. However, the physical, the chemical, and the optical behaviors of CAR are different from those of non-CAR. In this study, the intensity and the acid distributions for CAR and non-CAR are simulated and compared by using the vertical propagation model, the standard model (or the defocus model), the second-order correction model, and the full scalar model. To discuss and analyze the intensity and the acid distributions, we calculate aerial images of the projection lens systems by using scalar diffraction theory. We find that because of the dierent models and changes in the simulation parameters, the standing wave eects of CAR and non-CAR behave differently. The simulation results show good agreement with the results of a commercial tool.
URI
https://www.jkps.or.kr/journal/view.html?uid=5091&vmd=Fullhttps://repository.hanyang.ac.kr/handle/20.500.11754/157676
ISSN
0374-4884; 1976-8524
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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