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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-10 of 82 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2005-09
Fabrication of Hot Embossing Plastic Stamps for Microstructure
박진구
2005-07
Particle Adhesion and Removal on EUV Mask Layers During Wet Cleaning
박진구
2005-11
Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA
박진구
2005-09
Ruthenium CMP에서 Cerium Ammonium Nitrate와 알루미나 연마 입자가 연마 거동에 미치는 영향
박진구
2005-07
Laser Shock Removal of Nanoparticles from Si Capping Layer of Extreme Ultraviolet Lithography Masks
박진구
2005-11
Optimizing the Plasma Deposition Process Parameters of Antistiction Layers using a DOE(Design of Experiment)
박진구
2005-06
The Deposition and Characterization of 10nm Thick Teflon-like Anti-stiction Films for the Hot Embossing
박진구
2005-06
Fabrication of plastic CE(capillary electrophoresis) microchip by hot embossing process
박진구
2005-10
Nanoscale Particles Removal on an Extreme Ultra-Violet Lithography(EUVL) Mask Layer by Lasershock Cleaning
박진구
2005-10
The Effects of pH Adjustors in Post Cu CMP Cleaning Solutions on Particle Adhesion and Removal
박진구
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CMP
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Cu CMP
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AFM/LFM
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Anti-stiction layer
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BTA
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Etch rate
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Hot Embossing
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