Fabrication of Hot Embossing Plastic Stamps for Microstructure
- Title
- Fabrication of Hot Embossing Plastic Stamps for Microstructure
- Other Titles
- 마이크로 구조물 형성을 위한 핫 엠보싱용 플라스틱 스탬프 제작
- Author
- 박진구
- Keywords
- nanoimprinting; hot embossing; plastic mold; high temperature epoxy
- Issue Date
- 2005-09
- Publisher
- 한국재료학회
- Citation
- 한국재료학회지, v. 15, No. 9, Page. 589-593
- Abstract
- Nanoimprinting lithography (NIL) is known as a suitable technique for fabricating nano and micro structures of high definition. Hot embossing is one of NIL techniques and can imprint on thin films and bulk polymers. Key issues of hot embossing are time and expense needed to produce a stamp withstanding a high temperature and pressure. Fabrication of a metal stamp such as an electroplated nickel is cost intensive and time consuming. A ceramic stamp made by silicon is easy to break when the pressure is applied. In this paper, a plastic stamp using a high temperature epoxy was fabricated and tested. The plastic stamp was relatively inexpensive, rapid to produce and durable enough to withstanding multiple hot embossing cycles. The merits of low viscosity epoxy solutions were a fast degassing and a rapid filling the microstructures. The hot embossing process with plastic stamp was performed on PMMA substrates. The hot embossing was conducted at 12.6 bar, 120∘C
120∘C
and 10 minutes. An imprinted PMMA wafer was almost same value of the plastic stamp after 10 times embossing. Entire fabrication process from silicon master to plastic stamp was completed within 12 hours.
- URI
- http://www.koreascience.or.kr/article/JAKO200511722704248.pagehttps://repository.hanyang.ac.kr/handle/20.500.11754/112051
- ISSN
- 1225-0562; 2287-7258
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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