Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA
- Title
- Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA
- Author
- 박진구
- Issue Date
- 2005-11
- Publisher
- 한국물리학회
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 47, No. 9(3), Page. 530-534
- Abstract
- We investigated the possibility of using hot embossing for polymer-based flexible substrates. A Si mold had a mixture of patterns from 1 mu m to 500 mu m width and was imprinted on various thicknesses of PMMA. To obtain a good release process between the mold and replica, an antistiction layer was coated on the mold. All procedures were conducted in a clean room to ensure a particle-free result. Printing conditions were optimized as functions of process pressure and temperature plotted and calculated. Thin layers need a higher temperature and pressure than thick layers. The mold structures were successfully replicated into a PMMA substrate over the area of a 4-inch wafer.
- URI
- http://www.jkps.or.kr/journal/view.html?uid=7401&vmd=Fullhttps://repository.hanyang.ac.kr/handle/20.500.11754/112049
- ISSN
- 0374-4884; 1976-8524
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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