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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-10 of 12 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2015-03
Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography
안진호
2015-04
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
안진호
2015-03
Dimensionally controlled complex 3D sub-micron pattern fabrication by single step dual diffuser lithography (DDL)
안진호
2015-03
The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography
안진호
2015-07
Roughening of Polyimide Surface for Inkjet Printing by Plasma Etching Using the Polyimide Masked with Polystyrene Nanosphere Array
안진호
2015-07
Lattice Distortion in In3SbTe2 Phase Change Material with Substitutional Bi
안진호
2015-08
Lattice Distortion in In3SbTe2 Phase Change Material with Substitutional Bi (vol 5, 12867, 2015)
안진호
2015-09
Resistive Switching Characteristics of Atomic-Layer-Deposited Y2O3 Insulators with Deposition Temperature
안진호
2015-09
SRAF를 적용한 극자외선 노광기술용 위상 변위 마스크의 반사도에 따른 이미징 특성 연구
안진호
2015-09
HF 습식 식각을 이용한 극자외선 노광 기술용 SiNx 펠리클 제작 공정
안진호
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EUV
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EUV lithography
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EUVL
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Pellicle
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Absorber
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Atomic Layer Deposition
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Beyond EUVL
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CHANGE MEMORY
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Deflection
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Deformation
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