Fast and accurate quasi-three-dimensional capacitance determination of multilayer VLSI interconnects
- Title
- Fast and accurate quasi-three-dimensional capacitance determination of multilayer VLSI interconnects
- Author
- 심종인
- Keywords
- crosstalk; interconnect capacitance; multilayer; shielding effect; signal delay; VLSI interconnects
- Issue Date
- 2001-06
- Publisher
- Institute of Electrical and Electronics Engineers
- Citation
- IEEE Transactions on Very Large Scale Integration (VLSI) Systems, v. 9, NO. 3, Page. 450-460
- Abstract
- A new fast and accurate capacitance determination methodology for intricate multilayer VLSI interconnects is presented, Since a multilayer interconnect structure is too complicated to be directly tractable, it is simplified by investigating charge distributions within the system, The quasi-three-dimensional (3-D) capacitances of the structure are then determined by combining a set of solid-ground-based two-dimensional (2-D) capacitances and shielding effects that can be independently calculated from the simplified structure, The shielding effects due to the neighboring lines of a line can be analytically determined from the given layout dimensions, The solid-ground-based 2-D capacitances can also be quickly computed from the simplified structure. Thus, the proposed capacitance determination methodology is much more cost-efficient than conventional 3-D-based methods. It is shown that the calculated quasi-3-D capacitances have excellent agreement with 3-D held-solver-based results within 5% error.
- URI
- https://ieeexplore.ieee.org/document/929579https://repository.hanyang.ac.kr/handle/20.500.11754/184084
- ISSN
- 1063-8210;1557-9999
- DOI
- 10.1109/92.929579
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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