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Fabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic biochip
- Title
- Fabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic biochip
- Author
- 이선영
- Issue Date
- 2007-11
- Publisher
- IEEE
- Citation
- Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, article no. 4456240, Page. 334-335
- Abstract
- In this paper, SUS mold was fabricated using both ECF method and FeCl 3 wet etching. The ECF mold showed the surface roughness values much better than that for FeCl3 etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold.
- URI
- https://ieeexplore.ieee.org/document/4456240https://repository.hanyang.ac.kr/handle/20.500.11754/181527
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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