Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)Articles
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dc.contributor.author이선영-
dc.date.accessioned2023-05-26T04:39:48Z-
dc.date.available2023-05-26T04:39:48Z-
dc.date.issued2007-11-
dc.identifier.citationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, article no. 4456240, Page. 334-335-
dc.identifier.urihttps://ieeexplore.ieee.org/document/4456240en_US
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/181527-
dc.description.abstractIn this paper, SUS mold was fabricated using both ECF method and FeCl 3 wet etching. The ECF mold showed the surface roughness values much better than that for FeCl3 etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold.-
dc.languageen-
dc.publisherIEEE-
dc.titleFabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic biochip-
dc.typeArticle-
dc.identifier.doi10.1109/IMNC.2007.4456240-
dc.relation.page334-335-
dc.relation.journalDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC-
dc.contributor.googleauthorCho, Min Soo-
dc.contributor.googleauthorLim, Hyun Woo-
dc.contributor.googleauthorLee, Caroline Sunyong-
dc.contributor.googleauthorCho, Byung Ki-
dc.contributor.googleauthorCho, Young Sik-
dc.contributor.googleauthorPark, Jin-Goo-
dc.sector.campusE-
dc.sector.daehak공학대학-
dc.sector.department재료화학공학과-
dc.identifier.pidsunyonglee-
dc.identifier.article4456240-
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