Repository at Hanyang UniversityCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)APPLIED PHYSICS(응용물리학과)Articles
288
0
Thermomechanical stability evaluation of various pellicle structures with contaminant particles
- Title
- Thermomechanical stability evaluation of various pellicle structures with contaminant particles
- Author
- 오혜근
- Issue Date
- 2021-02
- Publisher
- IOP PUBLISHING LTD
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, v. 60, Article no. SCCA02, 11pp
- Abstract
- Extreme ultraviolet lithography in high-volume manufacturing requires a longer pellicle lifetime
- URI
- https://iopscience.iop.org/article/10.35848/1347-4065/abe687https://repository.hanyang.ac.kr/handle/20.500.11754/166934
- ISSN
- 0021-4922
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
