스핀코터 성능향상을 위한 모델링 및 민감도 해석
- Title
- 스핀코터 성능향상을 위한 모델링 및 민감도 해석
- Other Titles
- Modelling and Sensitivity Analysis for the Performance Improvement of a Spin Coater
- Author
- 정진태
- Keywords
- 스핀 코터(spin coater); 진동(vibration); 시스템 모텔링(system modeling); 본드 그래프(bond graph); 모델 검증(model verification); 민감도 해석(sensitivity analysis)
- Issue Date
- 2000-12
- Publisher
- 한국생산제조학회
- Citation
- 한국공작기계학회지, v. 9, no. 5, page. 96-102
- Abstract
- Spinning mechanism is generally used in coating process on grass plates. Rebounding PR(Photo Resist) which leads to occur inferiority of coating process is caused by vibrational energy of whole coating system. In this study, the sensitivity analysis is performed to analyze and reduce vibrational terms in the spin coating system. The sensitivity analysis is bared on the numerical expression of this system. By the bond graph method, power flow of each system is represented by some basic bond graph elements. Any energy domain system is modeled using the unified elements. The modelled spin coater system is verified with power spectrum data measured by FFT analyzer. As the results of verifying model parameters and sensitivity analysis, principal factors causing vibration phenomenon are mentioned. A study on vibration reduction method in the spin coating system is discussed .
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00922708https://repository.hanyang.ac.kr/handle/20.500.11754/162373
- ISSN
- 1226-8097
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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