Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진태 | - |
dc.date.accessioned | 2021-05-25T07:05:17Z | - |
dc.date.available | 2021-05-25T07:05:17Z | - |
dc.date.issued | 2000-12 | - |
dc.identifier.citation | 한국공작기계학회지, v. 9, no. 5, page. 96-102 | en_US |
dc.identifier.issn | 1226-8097 | - |
dc.identifier.uri | https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00922708 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/162373 | - |
dc.description.abstract | Spinning mechanism is generally used in coating process on grass plates. Rebounding PR(Photo Resist) which leads to occur inferiority of coating process is caused by vibrational energy of whole coating system. In this study, the sensitivity analysis is performed to analyze and reduce vibrational terms in the spin coating system. The sensitivity analysis is bared on the numerical expression of this system. By the bond graph method, power flow of each system is represented by some basic bond graph elements. Any energy domain system is modeled using the unified elements. The modelled spin coater system is verified with power spectrum data measured by FFT analyzer. As the results of verifying model parameters and sensitivity analysis, principal factors causing vibration phenomenon are mentioned. A study on vibration reduction method in the spin coating system is discussed . | en_US |
dc.description.sponsorship | 본 논문은 삼성 SDI(주)의 산학과제 "스핀코터 성능향상을 위한 진동 저감"에 관한 연구의 모델링 및 제어부분의 일부로 연구되었습니다. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국생산제조학회 | en_US |
dc.subject | 스핀 코터(spin coater) | en_US |
dc.subject | 진동(vibration) | en_US |
dc.subject | 시스템 모텔링(system modeling) | en_US |
dc.subject | 본드 그래프(bond graph) | en_US |
dc.subject | 모델 검증(model verification) | en_US |
dc.subject | 민감도 해석(sensitivity analysis) | en_US |
dc.title | 스핀코터 성능향상을 위한 모델링 및 민감도 해석 | en_US |
dc.title.alternative | Modelling and Sensitivity Analysis for the Performance Improvement of a Spin Coater | en_US |
dc.type | Article | en_US |
dc.relation.journal | 한국공작기계학회논문집 | - |
dc.contributor.googleauthor | 권태종 | - |
dc.contributor.googleauthor | 채호철 | - |
dc.contributor.googleauthor | 한창수 | - |
dc.contributor.googleauthor | 정진태 | - |
dc.contributor.googleauthor | 안강호 | - |
dc.relation.code | 2012101361 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | jchung | - |
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