Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)MECHANICAL ENGINEERING(기계공학과)Articles
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화학기계적 연마공정의 윤활역학적 압력 및 전단응력 분포 해석
- Title
- 화학기계적 연마공정의 윤활역학적 압력 및 전단응력 분포 해석
- Other Titles
- Hydrodynamic Pressure and Shear Stress in Chemical Mechanical Polishing
- Author
- 안유민
- Issue Date
- 2000-01
- Publisher
- 한국정밀공학회(Korean Society for Precision Engineering)
- Citation
- 한국정밀공학회지, v. 17, no. 1, page. 179-184
- Abstract
- ,,,
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00845389https://repository.hanyang.ac.kr/handle/20.500.11754/162175
- ISSN
- 1225-9071; 2287-8769
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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