Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)MECHANICAL ENGINEERING(기계공학과)Articles
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안유민 | - |
| dc.date.accessioned | 2021-05-17T05:47:03Z | - |
| dc.date.available | 2021-05-17T05:47:03Z | - |
| dc.date.issued | 2000-01 | - |
| dc.identifier.citation | 한국정밀공학회지, v. 17, no. 1, page. 179-184 | en_US |
| dc.identifier.issn | 1225-9071 | - |
| dc.identifier.issn | 2287-8769 | - |
| dc.identifier.uri | https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00845389 | - |
| dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/162175 | - |
| dc.description.abstract | ,,, | en_US |
| dc.language.iso | ko_KR | en_US |
| dc.publisher | 한국정밀공학회(Korean Society for Precision Engineering) | en_US |
| dc.title | 화학기계적 연마공정의 윤활역학적 압력 및 전단응력 분포 해석 | en_US |
| dc.title.alternative | Hydrodynamic Pressure and Shear Stress in Chemical Mechanical Polishing | en_US |
| dc.type | Article | en_US |
| dc.relation.journal | 한국정밀공학회지 | - |
| dc.contributor.googleauthor | 조철호 | - |
| dc.contributor.googleauthor | 박상신 | - |
| dc.contributor.googleauthor | 안유민 | - |
| dc.relation.code | 2012101691 | - |
| dc.sector.campus | E | - |
| dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
| dc.sector.department | DEPARTMENT OF MECHANICAL ENGINEERING | - |
| dc.identifier.pid | ahnym | - |
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