다분산 PSL입자를 이용한 반도체 클린룸용 필터의 성능 평가

Abstract

For the semiconductor clean room, DOP is not acceptable due to the possibility of the oil based carrier escaping the filters. Thus we have development and tested an alternative approach for a polydispersed polystyrene latex particle(PSL) for HEPA filter used by clean room. The manufactured PSL particles showed that GMD and GSD were 0.97 ㎛, 1.87. The HEPA filters show the most penetrating particles size is around 0.2㎛ in diameter. Thus performance test of HEPA filters using polydispersed PSL particles recommended as DOP substitution.