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다분산 PSL입자를 이용한 반도체 클린룸용 필터의 성능 평가

Title
다분산 PSL입자를 이용한 반도체 클린룸용 필터의 성능 평가
Other Titles
Performance Test of Filters Used Semiconductor Clean Room Using Polydisperse PSL Particles
Author
안강호
Keywords
DOP(Di-Octyl-Phtrate); PSL; HEPA; Penetration efficiency; Polydisperse particle; 폴리스티렌라텍스 입자; 고성능 필터; 투과효율; 다분산 입자
Issue Date
2002-11
Publisher
대한설비공학회
Citation
대한설비공학회 2002년도 동계학술발표회 논문집, page. 394-398
Abstract
For the semiconductor clean room, DOP is not acceptable due to the possibility of the oil based carrier escaping the filters. Thus we have development and tested an alternative approach for a polydispersed polystyrene latex particle(PSL) for HEPA filter used by clean room. The manufactured PSL particles showed that GMD and GSD were 0.97 ㎛, 1.87. The HEPA filters show the most penetrating particles size is around 0.2㎛ in diameter. Thus performance test of HEPA filters using polydispersed PSL particles recommended as DOP substitution.
URI
http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00694406https://repository.hanyang.ac.kr/handle/20.500.11754/157769
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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