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dc.contributor.author안강호-
dc.date.accessioned2021-02-02T05:34:17Z-
dc.date.available2021-02-02T05:34:17Z-
dc.date.issued2002-11-
dc.identifier.citation대한설비공학회 2002년도 동계학술발표회 논문집, page. 394-398en_US
dc.identifier.urihttp://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00694406-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/157769-
dc.description.abstractFor the semiconductor clean room, DOP is not acceptable due to the possibility of the oil based carrier escaping the filters. Thus we have development and tested an alternative approach for a polydispersed polystyrene latex particle(PSL) for HEPA filter used by clean room. The manufactured PSL particles showed that GMD and GSD were 0.97 ㎛, 1.87. The HEPA filters show the most penetrating particles size is around 0.2㎛ in diameter. Thus performance test of HEPA filters using polydispersed PSL particles recommended as DOP substitution.en_US
dc.description.sponsorship본 연구는 두뇌한국 21의 지원에 의하여 수행되었으며 이에 감사 드립니다.en_US
dc.language.isoko_KRen_US
dc.publisher대한설비공학회en_US
dc.subjectDOP(Di-Octyl-Phtrate)en_US
dc.subjectPSLen_US
dc.subjectHEPAen_US
dc.subjectPenetration efficiencyen_US
dc.subjectPolydisperse particleen_US
dc.subject폴리스티렌라텍스 입자en_US
dc.subject고성능 필터en_US
dc.subject투과효율en_US
dc.subject다분산 입자en_US
dc.title다분산 PSL입자를 이용한 반도체 클린룸용 필터의 성능 평가en_US
dc.title.alternativePerformance Test of Filters Used Semiconductor Clean Room Using Polydisperse PSL Particlesen_US
dc.typeArticleen_US
dc.contributor.googleauthor안진홍-
dc.contributor.googleauthor이상진-
dc.contributor.googleauthor안강호-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF ENGINEERING SCIENCES[E]-
dc.sector.departmentDEPARTMENT OF MECHANICAL ENGINEERING-
dc.identifier.pidkhahn-
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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